JPH0232359Y2 - - Google Patents

Info

Publication number
JPH0232359Y2
JPH0232359Y2 JP1985028520U JP2852085U JPH0232359Y2 JP H0232359 Y2 JPH0232359 Y2 JP H0232359Y2 JP 1985028520 U JP1985028520 U JP 1985028520U JP 2852085 U JP2852085 U JP 2852085U JP H0232359 Y2 JPH0232359 Y2 JP H0232359Y2
Authority
JP
Japan
Prior art keywords
stage
movement
axis table
wafer
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985028520U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61145938U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985028520U priority Critical patent/JPH0232359Y2/ja
Publication of JPS61145938U publication Critical patent/JPS61145938U/ja
Application granted granted Critical
Publication of JPH0232359Y2 publication Critical patent/JPH0232359Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Machine Tool Units (AREA)
JP1985028520U 1985-02-28 1985-02-28 Expired JPH0232359Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985028520U JPH0232359Y2 (en]) 1985-02-28 1985-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985028520U JPH0232359Y2 (en]) 1985-02-28 1985-02-28

Publications (2)

Publication Number Publication Date
JPS61145938U JPS61145938U (en]) 1986-09-09
JPH0232359Y2 true JPH0232359Y2 (en]) 1990-09-03

Family

ID=30526470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985028520U Expired JPH0232359Y2 (en]) 1985-02-28 1985-02-28

Country Status (1)

Country Link
JP (1) JPH0232359Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61219543A (ja) * 1985-03-26 1986-09-29 Koshin Seisakusho:Kk 移動加工装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5336757B2 (en]) * 1972-05-26 1978-10-04
JPS60147737A (ja) * 1984-01-13 1985-08-03 Hitachi Ltd ペリクルホルダ

Also Published As

Publication number Publication date
JPS61145938U (en]) 1986-09-09

Similar Documents

Publication Publication Date Title
JPS62229853A (ja) 平面状マイクロリソグラフイレチクル用の撓曲マウント
JPS59129636A (ja) ６自由度を有するステ−ジの制御装置
JPH07201699A (ja) ステージ装置
US4126376A (en) Manipulation device for precision adjustments including a double microscope having adjustable optical axes
US5850291A (en) Projection exposure apparatus and method for controlling a stage on the basis of a value corrected by ABBE error
JPH029550A (ja) ６自由度微動ステージの駆動装置
JP3907252B2 (ja) 露光装置およびデバイス製造方法ならびにステージ装置および原点出し方法
JPH0232359Y2 (en])
US4118869A (en) Device for positioning an object
JPH09223650A (ja) 露光装置
JPS58154846A (ja) マスク・パタ−ン投光複写装置
US20040025322A1 (en) Waffle wafer chuck apparatus and method
JPH0310221B2 (en])
JPS62150106A (ja) 位置検出装置
JPH04317Y2 (en])
JP2777931B2 (ja) 露光装置
JPS62114222A (ja) 露光装置
JPH085767A (ja) 駆動テーブル
US20030128345A1 (en) Scanning type exposure apparatus and a device manufacturing method using the same
JP4487688B2 (ja) ステップ式近接露光装置
JPS6345819A (ja) 投影露光装置におけるステ−ジ誤差測定装置
JPH0338714Y2 (en])
JPH0517874Y2 (en])
JPH0653116A (ja) マスク交換装置
JPH0548085Y2 (en])